MTI Corporation IBDS Page 1
Intematix
IBSD-100
Ion Beam Sputtering Deposition System
The Intematix IBSD-100 system is a versatile UHV multi-target ion
beam sputtering system designed for a variety of thin film deposition
applications. The system is ideal for materials R&D and the pilot line
production of thin film devices. Single crystal and polycrystalline thin
films of metals and metal compounds such as oxides, nitrides, fluorides
etc. can be in-situ deposited with atomically smooth surface
morphology.
Distributed by MTI Corporation
532 Jacuzzi Street, Bldg. 3-H, Richmond, CA 94804,
Tel. 510-525-3070, Fax. 510-525-4728, E-mail mti@mticrystal.com
