Evanescent Microwave Probe
Nondestructive Electrical Impedance Metrology/Microscopy
EMP-2001 is a nondestructive and very sensitive high-resolution imaging and me-
trology tool. The electrical impedance in the GHz range is measured through detec-
tion of shifts in resonance frequency and the quality factor of a high-Q evanescent
wave probe. This technology is a breakthrough in nanometer imaging and non-
contact characterization of the electrical properties of a wide range of materials from
insulating dielectrics, semi-insulators, semiconductors to highly conducting metals.
The newly designed EMP probe module allows for the simultaneous EMP mapping
of the electrical properties and AFM mapping of topographies of materials.
Distributed by MTI Corporation
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